Waferpedia

Comparison ledger

0015 20064 PartversusVHS 4

Applied Materials 0015 20064 Part, Varian VHS 4, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0015 20064 PartApplied Materials
VHS 4Varian
OEMApplied MaterialsVarian
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0015 20064 PartVarian VHS
Specifications
ConfigurationMod.. Rose Enclosures 33121206 Water Lea[1]—
ManufacturerApplied Materials[2]—
Part Number0015-20064[2]—
DescriptionMOD.. ROSE ENCLOSURES 33121206 WATER LEA[2]—
OEMApplied Materials[1]—
Model0015 20064[1]—
Pumping Speed—1200 l/s[3]
ASA Type Flange—9 in. OD, 5.9 in. ID[3]
Voltage—120V, 50/60 Hz[3]
Voltage/Frequency—120V, 50/60 Hz[3]
Type—High speed diffusion pump[4]
Inlet flange—9 in. OD, 5.9 in. ID[4]
Electrical requirements—120V, 50/60 Hz[3]
Cooling—Water cooled[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]asseta.comasseta.com
  3. [3]inventory listing
  4. [4]yorkscientific.comyorkscientific.com