Waferpedia

Comparison ledger

0020 12458 PartversusP 5000 DCVD

Applied Materials 0020 12458 Part, Applied Materials P 5000 DCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
P 5000 DCVDApplied Materials
OEMApplied MaterialsApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 12458 PartApplied Materials P 5000 DCVD
Specifications
ConfigurationInsulator,Side Match,Hdp-Cvd Ultima Plus[1]—
Asset number146526[1]—
MakeApplied Materials[1]—
Model0020 12458[1]P 5000[2]
Manufacturer—Applied Materials[2]
Process—Dielectric Chemical Vapor Deposition (DCVD)[2]
Category—Deposition[3]
Wafer size—up to 8 in wafers[3]
Film thickness—multiple microns thick[3]
Chambers—two dedicated chambers for dielectric PECVD[3]
TEOS/O2 chamber use—silicon dioxide[3]
SiH4/NH3 chamber capability—silicon nitrides[3]
Nominal operating temperature—~400C[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]cmdis.rpi.educmdis.rpi.edu