Waferpedia

Comparison ledger

0020 12458 PartversusGasonics Vector Express

Applied Materials 0020 12458 Part, Lam Research Gasonics Vector Express, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 12458 PartLam Research Gasonics Vector
Specifications
ConfigurationInsulator,Side Match,Hdp-Cvd Ultima Plus[1]TEOS[2]
Asset number146526[1]—
MakeApplied Materials[1]—
Model0020 12458[1]Vector Express[2]
OEM—Lam / Novellus / Gasonics[2]
System type—PECVD (Plasma-Enhanced Chemical Vapor Deposition)[2]
Wafer size—12 inch[2]
Process—TEOS[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing