Waferpedia

Comparison ledger

0020 17485 Partversus1000 E-Beam

Applied Materials 0020 17485 Part, CHA 1000 E-Beam, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
OEMApplied MaterialsCHA
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17485 PartCHA 1000
Specifications
ConfigurationStrap, RF Out 2 Balanced Coil Match, Hdp[1]CTI 10 Cryopump with lines, cable and compressor[2]
OEM—CHA[2]
Model—1000 E-Beam[2]
Category—Deposition[3]
Equipment type—E-Beam Evaporator[2]
Vacuum & pumping—CTI 10 Cryopump with lines, cable and compressor[3]
Control & software—New touch screen valve controller (1 year warranty)[3]
Configuration & options—Lift Off Dome[3]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com