Waferpedia

Comparison ledger

0020 17485 PartversusGasonics Vector Express

Applied Materials 0020 17485 Part, Lam Research Gasonics Vector Express, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
Gasonics Vector ExpressLam Research
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17485 PartLam Research Gasonics Vector
Specifications
ConfigurationStrap, RF Out 2 Balanced Coil Match, Hdp[1]TEOS[2]
OEM—Lam / Novellus / Gasonics[2]
Model—Vector Express[2]
System type—PECVD (Plasma-Enhanced Chemical Vapor Deposition)[2]
Wafer size—12 inch[2]
Process—TEOS[2]
0020 17485 Part entryGasonics Vector Express entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing