Comparison ledger
Applied Materials 0020 18698 Part, Perkin Elmer 6164, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0020 18698 PartApplied Materials | 6164Perkin Elmer |
|---|---|---|
| OEM | Applied Materials | Perkin Elmer |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0020 18698 Part | Perkin Elmer 6164 |
| Specifications | ||
| Configuration | Dial Cover, Side Local Match, Hdpcvd, Ul[1] | Metal deposition[2] |
| Gases | — | nitrogen, CDA[2] |
| Nitrogen consumption | — | 30PSI[2] |
| Exhaust | — | for pumps only[2] |
| Voltage | — | 208V, 100A[2] |
| Make | — | Perkin Elmer[2] |
| Model | — | 6164[2] |
| Equipment type | — | Sputtering system[2] |
| Process | — | Metal deposition[2] |
| Wafer size | — | 6 inch[2] |
| Power | — | 208V, 100A[2] |
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