Waferpedia

Comparison ledger

0020 19652 PartversusATM 204 207 Atmospheric Wafer Handling Robot

Applied Materials 0020 19652 Part, Brooks ATM 204 207 Atmospheric Wafer Handling Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 19652 PartApplied Materials
OEMApplied MaterialsBrooks
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 19652 PartBrooks ATM
Specifications
ConfigurationRetainer Bracket, Top Match, 200mm Ultim[1]Single Arm[2]
OEM—Brooks / PRI[2]
Model—ATM 204 / 207[2]
Equipment type—Atmospheric Wafer Handling Robot[2]
Wafer size—612 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing