Waferpedia

Comparison ledger

0020 34833 PartversusPfeiffer TPU 060 Turbomolecular

Applied Materials 0020 34833 Part, Balzers Pfeiffer TPU 060 Turbomolecular, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 34833 PartApplied Materials
OEMApplied MaterialsBalzers
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 34833 PartBalzers Pfeiffer TPU
Specifications
ConfigurationBlock Cont Mount H / V Interlock[1]—
Flange Type—DN 63 CF[2]
Operating Agent—TL 011[2]
Volume Flow Rate—56 l/s[2]
Type—Turbomolecular pump[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing