Waferpedia

Comparison ledger

0021 20868 PartversusTPH 170 Turbomolecular Vacuum

Applied Materials 0021 20868 Part, Pfeiffer TPH 170 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 20868 PartApplied Materials
OEMApplied MaterialsPfeiffer
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 20868 PartPfeiffer TPH
Specifications
ConfigurationBar, Bus, Gnd, Turbo Cb Encl, Gen Rack,[1]Humming sound when running[2]
Volume flow rate—170[2]
Voltage—110V[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing