Waferpedia

Comparison ledger

0041-39086 ESC PartversusCentura Dry

Applied Materials 0041-39086 ESC Part, Applied Materials Centura Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Centura DryApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura
Specifications
Configuration—3 Chamber Ultima[1]
Gas—BCL3, C2, SF6, He, Ar[1]
OS—AMAT Legacy[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing