Comparison ledger
Applied Materials 0041-39086 ESC Part, Lam Research 4520, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | 4520Lam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Lam Research Rainbow 4520 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | — | Envision Software[2] |
| Main Chamber | — | Top actuate clamping system[3] |
| Category | — | Etch[3] |
| Type | — | etcher[3] |
| System description | — | TCP oxide etch system[4] |
| Wafer size | — | 200 mm[4] |
| Software | — | Envision 1.52[4] |
| Wafer handling | — | Hine cassette indexer load / unload[3] |
| Loadlock | — | Entrance loadlock[3] |
| System type | — | single wafer, vacuum load-locked low pressure oxide etch system[1] |
| Load / unload | — | Hine cassette indexer load / unload[3] |
| Remote panel | — | Remote AC Panel[3] |
| Endpoint | — | Monochrometer[4] |
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