Waferpedia

Comparison ledger

0041-39086 ESC PartversusSEZ RST 201 Spin

Applied Materials 0041-39086 ESC Part, Lam Research SEZ RST 201 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
SEZ RST 201 SpinLam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research SEZ RST 201 Spin
Specifications
Wafer Size—6 inch[1]
Type—Spin Etcher[1]
Vintage—1997[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing