Comparison ledger
Applied Materials 0041-39086 ESC Part, Lam Research SEZ SP 203 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | SEZ SP 203 SpinLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Lam Research SEZ SP 203 |
| Specifications | ||
| Configuration | — | 50/60 Hz[1] |
| Voltage | — | 400 VAC[1] |
| Max. Current | — | 32 A[1] |
| Breaking Capacity | — | 10.000 AIC[1] |
| Power | — | 400V, 50 Hz, 3-Phase[2] |
| Phase | — | ENI VL-400 Phase Shift Controller[2] |
| Roughing Pump Code | — | A532-80-905[2] |
| OEM | — | Lam Research[3] |
| Model | — | SEZ SP 203 Spin[1] |
| Category | — | Etch[3] |
| Tool type | — | Spin etcher[3] |
| Wafer size | — | 150mm[4] |
| Vintage | — | 1999[4] |
| Process pump status | — | Process pump in one chemical cabinet (sub tool) has malfunction[1] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →