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0242-36515 RTP XE Chamber Temperature Match KitversusPH 101

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, ESPEC PH 101, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
PH 101ESPEC
OEMApplied MaterialsESPEC
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—ESPEC PH 101
Specifications
Configuration—Non-operational[1]
OEM—ESPEC[1]
Model—PH 101[1]
Equipment type—Oven[2]
Category—Thermal / Diffusion[2]
Operational status—Non-operational[1]
Vintage—2013[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com