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0242-36515 RTP XE Chamber Temperature Match KitversusTSA 71 S Thermal Shock

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, ESPEC TSA 71 S Thermal Shock, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsESPEC
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—ESPEC TSA
Specifications
Voltage—200V[1]
Configuration—50/60Hz[1]
Make—ESPEC[1]
Model—TSA 71 S[1]
Equipment Type—Thermal Shock Chamber[1]
Electrical—200V - 50/60Hz - Max. 80Amps[1]
Vintage—2005[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing