Waferpedia

Comparison ledger

Compass 200versus.496 PSL Wafer

Applied Materials Compass 200, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Compass 200Applied Materials
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials Compass 200KLA .496 PSL Wafer
Specifications
ConfigurationNeeds a Stage Controller X/Y Motor Commutation and Tuning[1]NIST Traceable[3]
TypeInspection machine[2]—
CategoryMetrology & Inspection[2]Metrology & Inspection[4]
Operating detailNeeds a stage controller X/Y motor commutation and tuning[2]—
Wafer size—8 inch[3]
Traceability—NIST Traceable[3]
Compatible systems—Capable on Surfscan 6xy0 and SP1[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com