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VIISta 810 XE Medium Currentversus0216 7696, E 11368072 ESC

Applied Materials VIISta 810 XE Medium Current, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials VIISta 810Varian 0216 7696, E 11368072 ESC
Specifications
ConfigurationHDD not included[1]Platen ADV-S Type[3]
OEMApplied Materials / Varian[1]—
ModelVIISta 810 XE[1]—
Tool typeMedium Current Implanter[1]—
CategoryIon Implantation[2]Ion Implantation[4]
Missing partsE19283630 - Low Energy Lens PS; E16316820 - Cable Assy, W3011, Low Energy Lens; E16316860 Harness Assy, W017, Suppression Feedback[1]—
HDDnot included[2]—
Type—ESC Platen ADV-S Type[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com