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Comparison ledger

VIISta 810 XE Medium Currentversus160 XP Ion

Applied Materials VIISta 810 XE Medium Current, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials VIISta 810Varian 160 XP Ion
Specifications
ConfigurationHDD not included[1]150mm High Current IMP[3]
OEMApplied Materials / Varian[1]Varian[4]
ModelVIISta 810 XE[1]160 XP Ion[4]
Tool typeMedium Current Implanter[1]ion implanter[3]
CategoryIon Implantation[2]Ion Implantation[3]
Missing partsE19283630 - Low Energy Lens PS; E16316820 - Cable Assy, W3011, Low Energy Lens; E16316860 Harness Assy, W017, Suppression Feedback[1]—
HDDnot included[2]—

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing