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17099370 Outer strike plateversusSEN NV GSD HE Ion

Axcelis 17099370 Outer strike plate, Sumitomo SEN NV GSD HE Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMAxcelisSumitomo
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis 17099370 Outer strike plateSumitomo SEN
Specifications
ConfigurationUsed with Axcelis GSD 200[1]200 Volt[4]
ManufacturerAxcelis[2]—
Model17099370 Outer strike plate[1]NV GSD HE[3]
Part numberOEM number 17099370[2]—
Used withAxcelis GSD 200[1]—
ConditionNEW[2]—
Voltage—480 V[3]
Phase—3 Phase[3]
Frequency—60 Hz[3]
Power—82 kVA[3]
Full Load Current—99 A[3]
Input Breaker—150 A[3]
Largest Load—99 A[3]
Max Interrupt Capacity—14 kA[3]
Make—Sumitomo / SEN[3]
Wafer Sizes—6 inch[4]
Vintage—2000 Vintage[4]
Wafer Size—6 inch[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]inventory listing