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Comparison ledger

17099370 Outer strike plateversusE 500 EHP

Axcelis 17099370 Outer strike plate, Varian E 500 EHP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
E 500 EHPVarian
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis 17099370 Outer strike plateVarian E 500 EHP
Specifications
ConfigurationUsed with Axcelis GSD 200[1]—
ManufacturerAxcelis[2]—
Model17099370 Outer strike plate[1]—
Part numberOEM number 17099370[2]—
Used withAxcelis GSD 200[1]—
ConditionNEW[2]—
Voltage—208 V[3]
Frequency—50 Hz[4]
Phase—3 Phase[3]
Category—Ion Implantation[5]
Implanter type—Medium current implanter[6]
Maximum beam energy—250 kV[3]
Wire configuration—5 Wire[3]
Wafer size—6"[3]
Convertible to 8"—Yes[6]
Thin wafer handling kit—Included[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]tarasemi.comtarasemi.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com
  6. [6]waferpedia.comwaferpedia.com