Comparison ledger
Axcelis 200 MCU, Axcelis 200 PCU Photoresist Stabilizer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 MCUAxcelis | |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Axcelis NV GSD 200 |
| Specifications | ||
| Configuration | Single Chamber[1] | 14 Amps[3] |
| Wafer Size | 8 inch (200 mm)[2] | — |
| Chamber Configuration | Single Chamber[1] | — |
| Vintage Year | 2000[2] | — |
| Manufacturer | Axcelis[1] | Axcelis[5] |
| Model | 200 MCU[1] | 200 PCU[5] |
| Tool type | Asher[1] | photoresist stabilizer[5] |
| Wafer size | 8 inch[1] | — |
| Voltage | — | 380 V[3] |
| Frequency | — | 50 Hz[3] |
| Phase | — | 3 Phase[3] |
| Category | — | Resist Processing[5] |
| Power | — | 14 Amps[3] |
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