Comparison ledger
Axcelis 200 PCU Photoresist Stabilizer, SCREEN RF 300 A Photo Track, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RF 300 A Photo TrackSCREEN | |
|---|---|---|
| OEM | Axcelis | SCREEN |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | SCREEN RF 300 A Photo Track |
| Specifications | ||
| Configuration | 14 Amps[1] | Modifications:[4] |
| Voltage | 380 V[1] | — |
| Frequency | 50 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Manufacturer | Axcelis[3] | — |
| Model | 200 PCU[3] | RF 300 A[4] |
| Tool type | photoresist stabilizer[3] | — |
| Category | Resist Processing[3] | — |
| Power | 14 Amps[1] | — |
| Robot Change | — | IHU, MHU (2), BHU[4] |
| Bake | — | CP (6), FRHP (7)[4] |
| Make | — | SCREEN / DNS[4] |
| Modifications | — | Robot Change: IHU, MHU (2), BHU; Bake: CP (6), FRHP (7); Loadport (10); Cleanbooth; SC Cup Parts (2) (change and retrofit); SD Cup Parts, Nozzle (2) (change and retrofit); 10 L Nowpack Cabinet; ETU-Cab; Resist 8 High Viscosity (140 cp); Low Height Mod (Top Module Separation); BARC/Resist Separation Drain; Facility Connection Parts (change and retrofit); Power BOX Mod Parts (change and retrofit); Fire Suppression[4] |
| Resist 8 High Viscosity | — | 140 cp[5] |
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