Comparison ledger
Balzers Pfeiffer TPU 240 Turbomolecular, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11600 SRDSemitool | |
|---|---|---|
| OEM | Balzers | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Balzers Pfeiffer TPU | Semitool 11600 SRD |
| Cited variants | — | |
| Specifications | ||
| Volume Flow Rate | 230[3] | — |
| Manufacturer | Balzers Pfeiffer[3] | Semitool[4] |
| Model | TPU 240[3] | 11600 SRD[4] |
| Part Number | PMP01330A[1] | — |
| Condition | Refurbished[1] | — |
| High-Vacuum Inlet Flange | DN 100 CF-F (6" ConFlat Fixed)[1] | — |
| Foreline / Exhaust Flange | DN 25 ISO-KF (NW25)[1] | — |
| Pumping Speed (N2) | 230 L/s[1] | — |
| Pumping Speed (He) | 240 L/s[1] | — |
| Pumping Speed (H2) | 210 L/s[1] | — |
| Compression Ratio (N2) | 1 × 10^8[1] | — |
| Ultimate Base Pressure | ≤ 1 × 10^-11 mbar (≤ 7.5 × 10^-12 Torr)[1] | — |
| Nominal Rotational Speed | 60,000 RPM[1] | — |
| Ramp-Up / Start Time | ≈ 1 to 3 minutes[1] | — |
| Cooling Method | Natural Convection / Forced Air / Water-Cooling (15 L/h at 15 °C)[1] | — |
| Lubricant Charge | 8 cm^3 F4 / F5 Operating Fluid Wick Compatible Controllers[1] | — |
| Weight | 9.0 kg (19.8 lbs)[1] | — |
| Equipment type | Turbomolecular pump[3] | Spin Rinse Dryer[4] |
| Part number | PM P01 330 A (PMP01330A)[1] | — |
| Lubricant charge | 8 cm3 F4 / F5 operating fluid wick compatible[1] | — |
| Compatible controllers | Pfeiffer TCP 121 / TCP 380 / TCP 300 series[1] | — |
| Make | Balzers Pfeiffer[3] | — |
| Type of product | turbo pump[2] | — |
| Inlet | 6" conflat[2] | — |
| Exhaust | KF25[2] | — |
| Vent valve | fixed[2] | — |
| Pumping speed | 230 l/s (N2)[2] | — |
| Compression ratio | 10^8 (N2)[2] | — |
| Recommended controller | TCP-121, TCP-380[2] | — |
| Recommended backing pump | DUO 016B[2] | — |
| OEM | Balzers Pfeiffer[3] | — |
| Device type | Turbomolecular pump[3] | — |
| Compression ratio (N2) | 10^8[2] | — |
| Another Part Number | PMP01330B[2] | — |
| Type | Turbomolecular pump[3] | — |
| Cooliing method | Natural convection / forced air / water-cooling[1] | — |
| Configuration | — | Ceramic[4] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →