Waferpedia

Comparison ledger

0 500versusVTP 1500 LH Vertical

Blue M 0 500, Semitool VTP 1500 LH Vertical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
OEMBlue MSemitool
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500Semitool VTP 1500 LH Vertical
Specifications
ManufacturerBlue M[1]Semitool[2]
Model0 500[1]VTP 1500 LH[2]
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]Vertical Furnace[2]
Configuration—High temperature dry oxidation process[2]
Description—Vertical Furnace[3]
Process—High temperature dry oxidation process[2]
Part No.—VTP1500LH[3]
Process description—High temperature dry oxidation process[2]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]semi-sps.comsemi-sps.com
  4. [4]semistarcorp.comsemistarcorp.com