Comparison ledger
Blue M 0 V 500, Varian HS 16 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | HS 16 DiffusionVarian |
|---|---|---|
| OEM | Blue M | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | Varian HS 16 Diffusion |
| Cited variants | — | |
| Specifications | ||
| Configuration | — | 8100 Watts[2] |
| Voltage | — | 480 V[2] |
| Manufacturer | — | Varian[2] |
| Model | — | HS 16[2] |
| Category | — | Thermal / Diffusion[3] |
| Type | — | Diffusion pump[4] |
| Pumping speed, air | — | 6,000 L/s[4] |
| Pumping speed, helium | — | 7,500 L/s[4] |
| Inlet flange | — | 16" ASA[4] |
| Foreline flange | — | 3" ASA[4] |
| Cooling method | — | Water cooling[4] |
| Electrical power | — | 8.1 kW[1] |
| Input voltage | — | 480 V[2] |
| Electrical requirements | — | 3-phase, 50/60 Hz, 240/415/480 V[5] |
| Operating range | — | 7x10^-4 to <5x10^-8 Torr[1] |
| Weight | — | 500 lbs (227 kg)[1] |
| Jet assembly | — | 5-stage jet assembly[1] |
| Cooling | — | Water-cooled[1] |
| Heater location | — | Mounted at the bottom of the pump body[1] |
| Operating pressure range | — | 7x10−4 Torr to <5x10−8 Torr[1] |
| Maximum pumping speed, air | — | 10,000 l/s[1] |
| Maximum pumping speed, helium | — | 12,500 l/s[1] |
| Cooling water flowrate | — | 1.5 gpm (US) at inlet temperature of 60 to 80 °F[1] |
| Warmup time | — | 30 minutes[1] |
| Cooldown time without Quick Cool | — | 48 minutes[1] |
| Cooldown time with Quick Cool | — | 30 minutes[1] |
| Fluid charge | — | 3 qt (US) / 2.8 liters[1] |
| Recommended backing pump capacity | — | 80 cfm[1] |
| Height, minimum including clearance for heater access | — | 51 in (1295.4 mm)[1] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →