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017-0024-01 PrealignerversusFPA 5500 iZ+ i-Line

Brooks 017-0024-01 Prealigner, Canon FPA 5500 iZ+ i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
FPA 5500 iZ+ i-LineCanon
OEMBrooksCanon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerCanon FPA 5500
Cited variants—
  • FPA 5500 iZ+ i-Line Stepperi-line[1]
  • FPA 5500 iZi-line[2]
  • FPA 5500 iZ i-Line[2]
Specifications
Configuration—350nm[2]
Make—Canon[3]
Model—FPA 5500 iZ+[3]
Type—Stepper[3]
i-Line—Yes[3]
Wafer Sizes—12 inch[4]
Vintage—2004[3]
017-0024-01 Prealigner entryFPA 5500 iZ+ i-Line entryAsk about these tools →Share experience with this comparison →

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing