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017-0024-01 PrealignerversusNSR 1755 G 7 A

Brooks 017-0024-01 Prealigner, Nikon NSR 1755 G 7 A, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerNikon NSR 1755
Specifications
Configuration—0.5um[1]
Type—Stepper[2]
Category—Lithography[2]
Wafer sizes—6 inch[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com