Comparison ledger
Brooks 017-0146-01 Prealigner, Canon FPA 6000 ES 5, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | FPA 6000 ES 5Canon |
|---|---|---|
| OEM | Brooks | Canon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Canon FPA 6000 |
| Specifications | ||
| Configuration | — | KrF[1] |
| Manufacturer | — | Canon[1] |
| Model | — | FPA 6000 ES 5[1] |
| Equipment type | — | Scanner[1] |
| Category | — | Lithography[2] |
| Exposure wavelength | — | 248 nm[1] |
| Exposure source | — | KrF[1] |
| Vintage | — | 2003[1] |
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