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017-0146-01 PrealignerversusNSR 1755 i 8 A i-Line

Brooks 017-0146-01 Prealigner, Nikon NSR 1755 i 8 A i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
NSR 1755 i 8 A i-LineNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon NSR 1755
Cited variants—
  • NSR 1755 i 8 Ai-line[1]
  • NSR 1755 i 8 A i-linei-line[2]
Specifications
Configuration—0.45um[3]
Manufacturer—Nikon[3]
Model—NSR 1755 i 8 A[3]
Equipment type—i-Line Stepper[3]
Wafer sizes—6, 8 inch[3]
Resolution—0.45um[3]
Vintage—1994[3]
017-0146-01 Prealigner entryNSR 1755 i 8 A i-Line entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing