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017-0146-01 PrealignerversusNSR SF 140 i-Line

Brooks 017-0146-01 Prealigner, Nikon NSR SF 140 i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
NSR SF 140 i-LineNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon NSR
Cited variants—
Specifications
Configuration—With HDD[2]
Manufacturer—Nikon[2]
Model—NSR SF 140[2]
Equipment type—Stepper[1]
Application—Semiconductor lithography[1]
Wafer size—12 inch[2]
017-0146-01 Prealigner entryNSR SF 140 i-Line entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing