Waferpedia

Comparison ledger

Dimension Vx 330versus.496 PSL Wafer

Bruker Dimension Vx 330, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMBrukerKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBruker DimensionKLA .496 PSL Wafer
Specifications
ConfigurationRefurbished[1]NIST Traceable[3]
ManufacturerBruker[2]—
MakeBruker / Veeco[1]—
ModelDimension Vx 330[1]—
Tool typeAFM (Atomic Force Microscope)[1]—
Wafer size12 inch[1]8 inch[3]
Traceability—NIST Traceable[3]
Compatible systems—Capable on Surfscan 6xy0 and SP1[3]
Category—Metrology & Inspection[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com