Comparison ledger
Canon FPA 5500 iZ+ i-Line, Nikon 1505 G 6 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 5500 iZ+ i-LineCanon | 1505 G 6 ENikon |
|---|---|---|
| OEM | Canon | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1988– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 5500 | Nikon 1505 |
| Cited variants | — | |
| Specifications | ||
| Configuration | 350nm[2] | 5" reticle[5] |
| Make | Canon[3] | Nikon[5] |
| Model | FPA 5500 iZ+[3] | 1505 G 6 E[5] |
| Type | Stepper[3] | — |
| i-Line | Yes[3] | — |
| Wafer Sizes | 12 inch[4] | 4 inch[5] |
| Vintage | 2004[3] | — |
| Resolution | — | 650 nm[6] |
| Numerical Aperture | — | 0.54[6] |
| Reduction | — | 5x[6] |
| Exposure Field | — | 15 x 15 mm[6] |
| Alignment Accuracy | — | 130 nm[6] |
| Wafer Size | — | 4 inch[5] |
| Light Source | — | g-line[7] |
| Introduction Year | — | 1988[6] |
| NA (Numerical Aperture) | — | 0.54[6] |
| Category | — | Stepper[5] |
| Exposure type | — | g-line[6] |
| NA | — | 0.54[6] |
| Exposure field | — | 9.3 x 18.8 mm[6] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →