Comparison ledger
Canon MPA 600 FA Parts, Cascade Microtech 103-754, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MPA 600 FA PartsCanon | 103-754Cascade Microtech |
|---|---|---|
| OEM | Canon | Cascade Microtech |
| Category | Test & Probe | Test & Probe |
| Wafer size | Quartz Wafer | 6-inch diameter microchamber and thermal chuck |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon MPA 600 FA Parts | Cascade Microtech 103-754 |
| Cited variants | — | |
| Specifications | ||
| Wafer size | Quartz Wafer[1] | — |
| Configuration | Test Mask[2] | — |
| type | — | x-y-z-θ probe positioner[6] |
| installed on | — | HFTL 50-GHz Small-Signal Probe Station[6] |
| quantity in station | — | two[6] |
| station chuck size | — | 6-inch-diameter microchamber and thermal chuck[6] |
| Quantity per station | — | Two positioners[6] |
| Chuck size | — | 6-inch-diameter microchamber and thermal chuck[6] |
| Temperature range | — | -50 to 200 °C[6] |
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