Comparison ledger
Cascade Microtech M 150, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | M 150Cascade Microtech | |
|---|---|---|
| OEM | Cascade Microtech | Tenney |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech M 150 | Tenney , TPS JR-A-F4T Junior compact temperature test chambers |
| Specifications | ||
| Maximum wafer size | 150 mm[1] | — |
| Number of manipulators | 4[1] | — |
| Measurement range | DC to high-frequency RF[1] | — |
| Chuck type | Vacuum[1] | — |
| Probe movement | Three-axis[1] | — |
| Microscope | Optical[1] | — |
| Probe card support | Yes[1] | — |
| Wafer positioning | Die-by-die stepping[1] | — |
| Chamber Size | — | 1.2 cubic feet[2] |
| Temperature Range | — | -68°C to +180°C[2] |
| Control | — | +/-1.0°C[2] |
| Manufacturer | — | Tenney[2] |
| Model | — | JR-A-F4T[2] |
| Short description | — | Junior compact temperature test chambers[2] |
| Control accuracy | — | +/-1.0°C[2] |
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