Comparison ledger
Cascade Microtech R 6100, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | R 6100Cascade Microtech | |
|---|---|---|
| OEM | Cascade Microtech | Tenney |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech R 6100 | Tenney , TPS JR-A-F4T Junior compact temperature test chambers |
| Specifications | ||
| Configuration | Thermal chuck plus X/Y/Z/θ servos[1] | — |
| Make | Cascade Microtech[1] | — |
| Model | R 6100[1] | JR-A-F4T[3] |
| Wafer sizes | 8 inch[1] | — |
| Travel | 8-inch travel[2] | — |
| Resolution | Sub-micron resolution[2] | — |
| Motion control | Precise motion control[2] | — |
| Chamber Size | — | 1.2 cubic feet[3] |
| Temperature Range | — | -68°C to +180°C[3] |
| Control | — | +/-1.0°C[3] |
| Manufacturer | — | Tenney[3] |
| Short description | — | Junior compact temperature test chambers[3] |
| Control accuracy | — | +/-1.0°C[3] |
Plan your fab
Building a Test & Probe process? Get a complete equipment list.
Open the fab equipment planner →