Waferpedia

Comparison ledger

100 Spinversus80 B

CEE 100 Spin, SCREEN 80 B, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
80 BSCREEN
OEMCEESCREEN
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 100SCREEN SK 80
Specifications
ConfigurationVolts 115[1]Main body[2]
Make—SCREEN / DNS[2]
Model—80 B[2]
Equipment type—Coater / Developer[2]
Included items—Main body; accessory equipment; AC unit and ETU; support cabinet and power[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing