Comparison ledger
CHA IG-100, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IG-100CHA | |
|---|---|---|
| OEM | CHA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CHA IG-100 | KLA .496 PSL Wafer |
| Specifications | ||
| Type | Ion gauge series[1] | — |
| Use | Pressure measurements within the chamber[1] | — |
| System type | Inert gas fire extinguishing system[2] | — |
| Application | Total flooding[2] | — |
| Agent | IG-100 inert gas[2] | — |
| Actuation | Mechanical manual actuation via a strike knob attached to the container valve; electrical actuation via a removable side mounted solenoid[2] | — |
| Pressure measurement use | Used for pressure measurements within the chamber[1] | — |
| Feedthrough mounting | FT58-042 feedthrough is commonly used for mounting the CHA IG-100 series[1] | — |
| Configuration | — | NIST Traceable[3] |
| Wafer size | — | 8 inch[3] |
| Traceability | — | NIST Traceable[3] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[3] |
| Category | — | Metrology & Inspection[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →