Waferpedia

Comparison ledger

SQ 3000 3D AOIversus.496 PSL Wafer

CyberOptics SQ 3000 3D AOI, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
SQ 3000 3D AOICyberOptics
OEMCyberOpticsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCyberOptics SQ 3000KLA .496 PSL Wafer
Specifications
P/N8021880[1]—
ConfigurationPSX3D Multi Camera + Projector 3D Sensor featuring MRS Technology[1]NIST Traceable[4]
Workstation (P/N8022409):[1]—
CyberReport SPC Software (P/N80022384):[1]—
OEMCyberOptics[1]—
ModelSQ 3000 3D AOI[1]—
Inspection typeAutomated Optical Inspection (AOI)[2]—
SensorPSX3D multi-camera + projector 3D sensor featuring MRS Technology[2]—
Inspection capability20 x 20 in[2]—
ConveyorAuto-width adjust conveyor[1]—
Board stopMechanical board stop[1]—
SoftwareAI image analysis software[1]—
User interfaceLocalized operator user interface[1]—
Included monitorTouch screen monitor[1]—
Default conveyor directionLeft to right movement[1]—
WorkstationOffline programming and defect review workstation included[1]—
CyberReport SPC softwareMachine-level SPC software with historical charting analysis and USB license dongle[1]—
Inspection speed15 cm²/sec (2D+3D)[3]—
Minimum component size0201 mm (008004 in.)[3]—
PCB size50 x 50 mm (2 x 2 in.) to 510 x 510 mm (20 x 20 in.)[3]—
Component height clearance50 mm[3]—
PCB thickness0.3 x 5 mm[3]—
Image processingAutonomous Image Interpretation (AI2) Technology, Coplanarity and Lead Measurement[3]—
CMM accuracy XY / Z2 μm / 2 μm[3]—
CMM resolution XY / Z7 μm / 1 μm[3]—
Z height accuracy1 μm on certification target[3]—
Z height measurement range3 mm at spec, 10 mm capability[3]—
Wafer size—8 inch[4]
Traceability—NIST Traceable[4]
Compatible systems—Capable on Surfscan 6xy0 and SP1[4]
Category—Metrology & Inspection[5]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]c2mi.cac2mi.ca
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com