Waferpedia

Comparison ledger

BTT IV Thermal versus Infinity 18

Denton Vacuum BTT IV Thermal and Denton Vacuum Infinity 18, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
BTT IV ThermalDenton Vacuum
Infinity 18Denton Vacuum
OEMDenton VacuumDenton Vacuum
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDenton Vacuum BTT IV ThermalDenton Vacuum Infinity 18
Specifications
Voltage208 V, Single Phase, 50/60 Hz, 20 A[1]208V, 3Ph, 50/60Hz, 70A[2]
ConfigurationBenchtop[1]Telemark 860 deposition controller panel[2]
Chamber size18" x 23" x 36"[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing