Comparison ledger
Denton Vacuum Infinity 18 and Denton Vacuum Thermal, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Infinity 18Denton Vacuum | ThermalDenton Vacuum |
|---|---|---|
| OEM | Denton Vacuum | Denton Vacuum |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Denton Vacuum Infinity 18 | Denton Vacuum Thermal |
| Specifications | ||
| Configuration | Telemark 860 deposition controller panel[1] | Diffusion Pump[2] |
| Chamber size | 18" x 23" x 36"[1] | — |
| Voltage | 208V, 3Ph, 50/60Hz, 70A[1] | — |
Plan your fab
Building a Deposition process? Get a complete equipment list.
Open the fab equipment planner →