Waferpedia

Comparison ledger

321 versus DAD3221

Disco 321 and Disco DAD3221, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
321Disco
DAD3221Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size150mm
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco 321Disco DAD3221
Specifications
OEMDisco[1]
Model321[1]
Equipment typeWafer Dicing Saw[1]
Facility contextCleanroom Instrumentation[1]
Application areaNano and Micro Fabrication[1]
LocationFNT 4.106[1]
Typeautomatic dicing saw[2]
Wafer size100, 150 mm wafers[2]
Setupnon-contact setup[2]
Blade monitoringblade breakage detector[2]
Cutting functionscircle cut for edge trimming or down sizing[2]
Particle/ESD mitigationCO2 injector to prevent particle adhesion and electrostatic discharge damage[2]
Alignment aidspattern recognition system; automatic micro-alignment[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]epfl.chepfl.ch