Waferpedia

Comparison ledger

321 versus DFG 840 Automatic

Disco 321 and Disco DFG 840 Automatic, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
321Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco 321Disco DFG
Specifications
OEMDisco[1]
Model321[1]
Equipment typeWafer Dicing Saw[1]
Facility contextCleanroom Instrumentation[1]
Application areaNano and Micro Fabrication[1]
LocationFNT 4.106[1]
Phase3 Phase[2]
Configuration50/60 Hz[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]inventory listing