Waferpedia

Comparison ledger

3220 versus KR15

Disco 3220 and Disco KR15, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
KR15Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size8"
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco 3220Disco KR15
Cited variants
  • KR15-A/KR15-B[1]
Specifications
equipment typedicing saw[2]
Workplace sizeø150 mm[3]
Spindle layoutSingle[3]
Spindle output1.5 kW at 30,000 min-1[3]
Spindle max revolution speed40,000 min-1[3]
X-axis feed speed range0.1 – 500 mm/s[3]
Y-axis index step0.0001 mm[3]
Z-axis repeating accuracy0.001 mm[3]
Z-axis max blade sizeø58 mm[3]
Blade designationDisco KR15[4]
Blade thickness200 micron[4]
Blade gritlow grit[4]
Intended materialssapphire, glass, and silicon[4]
Max. workpiece sizeΦ8"[4]
Thickness200 micron[4]
GritLow grit[4]

Plan your fab

Building a Dicing & Grinding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]thk.comthk.com
  2. [2]nanofab.utah.edunanofab.utah.edu
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]aggiefab.tamu.eduaggiefab.tamu.edu