Comparison ledger
Edwards Spectra G 800, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Spectra G 800Edwards | 11600 SRDSemitool |
|---|---|---|
| OEM | Edwards | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Edwards Spectra G 800 | Semitool 11600 SRD |
| Specifications | ||
| Configuration | 4 port inlets[1] | Ceramic[3] |
| Phase | 3 Phase[1] | — |
| Maximum gas flow rate | 800 slm[2] | — |
| Number of inlet ports | 1 to 4[2] | — |
| Electrical supply | 200-208 VAC 3-phase[2] | — |
| Frequency | 50/60 Hz[2] | — |
| Power consumption | 4 kW[2] | — |
| Nitrogen supply pressure | 7 bar[2] | — |
| Fuel gas supply pressure | 137 mbar (2 psi)[2] | — |
| Extract flow rate | 60 Nm3/min[2] | — |
| Mass | 658 Kg[2] | — |
| Combustion stages | 4-stage[2] | — |
| Number of inlet ports (listing source) | 4 port inlets[1] | — |
| Manufacturer | — | Semitool[3] |
| Model | — | 11600 SRD[3] |
| Equipment type | — | Spin Rinse Dryer[3] |
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