Comparison ledger
EV Group 120 Automated Coater Processing, SCREEN RF 300 A Photo Track, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 Automated Coater ProcessingEV Group | RF 300 A Photo TrackSCREEN |
|---|---|---|
| OEM | EV Group | SCREEN |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 120 Automated Coater Processing | SCREEN RF 300 A Photo Track |
| Specifications | ||
| Configuration | 50/60 Hz[1] | Modifications:[2] |
| Phase | 3 Phase[1] | — |
| Wafer sizes | 6 inch, 8 inch[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Wiring configuration | 4 Wire + GND[1] | — |
| Vintage | 2015[1] | — |
| Robot Change | — | IHU, MHU (2), BHU[2] |
| Bake | — | CP (6), FRHP (7)[2] |
| Make | — | SCREEN / DNS[2] |
| Model | — | RF 300 A[2] |
| Modifications | — | Robot Change: IHU, MHU (2), BHU; Bake: CP (6), FRHP (7); Loadport (10); Cleanbooth; SC Cup Parts (2) (change and retrofit); SD Cup Parts, Nozzle (2) (change and retrofit); 10 L Nowpack Cabinet; ETU-Cab; Resist 8 High Viscosity (140 cp); Low Height Mod (Top Module Separation); BARC/Resist Separation Drain; Facility Connection Parts (change and retrofit); Power BOX Mod Parts (change and retrofit); Fire Suppression[2] |
| Resist 8 High Viscosity | — | 140 cp[3] |
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