Comparison ledger
EV Group 420 Mask and EV Group 620, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 420 MaskEV Group | 620EV Group |
|---|---|---|
| OEM | EV Group | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 420 Mask | EV Group 620 |
| Specifications | ||
| Configuration | Can only align wafers[1] | Mercury Lamp Exposure System[2] |
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