Waferpedia

Comparison ledger

3828-46versus1 DP 41

GigaMat 3828-46, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
3828-46GigaMat
1 DP 41Logitech
OEMGigaMatLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyGigaMat 3828-46Logitech 1 DP 41
Specifications
MakeGigaMat[1]Logitech[2]
Model3828-46[1]1 DP 41[2]
Tool typeCMP (Chemical Mechanical Polisher)[1]—
Phase—3 Phase[2]
Configuration—50/60 Hz[2]
Voltage—480 V[2]
Frequency—50/60 Hz[2]
Current—12 amps[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing