Waferpedia

Comparison ledger

Technologies Jewel Boxversus1.112 PSL Wafer

Glenbrook Technologies Jewel Box, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMGlenbrookKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyGlenbrook Technologies Jewel BoxKLA 1.112 PSL Wafer
Specifications
ConfigurationUltra compact, real time[1]NIST Traceable[3]
Voltage80 kv[1]—
X-ray tube10 micron focal spot X-ray tube for up to 500x geometric and 1,200x optical magnification[1]—
Controlcomputer[1]—
Software / processorGTI-2000 software / processor for 2-256 frame averaging[1]—
MotionAllows x-y-z movement, rotation, and tilt with joystick positioning[1]—
Scan area9” x 5”[1]—
Contrast adjustmentManual and automatic[1]—
Measurementx y measurement[1]—
Imaging featuresText, label, markers, 3D rendering[1]—
ViewingSplit screen viewing[1]—
RecordingAvi video recording and image download[1]—
Focal spot10 micron focal spot X-ray tube[1]—
Geometric magnificationup to 500x[2]—
Optical magnificationup to 1,200x[2]—
Control computercomputer[2]—
Wafer Size—8 inch[3]
NIST Traceable—True[3]
Compatible Tools—Surfscan 6xy0 and Sp1[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com