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Comparison ledger

1800 EXLversus0332 F 9453 302 Diffusion

Heller 1800 EXL, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1800 EXLHeller
OEMHellerVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 18xxVarian 0332 F 9453 302 Diffusion
Cited variants—
Specifications
Configurationwith computer controller[2]—
Phaseconverted to 208V 3 phase[2]—
Equipment typeOven[2]—
Machine designationHeller 1800 EXL[2]—
ControllerComputer controller[2]—
Electrical conversionConverted to 208V 3 phase[2]—
Vintage2000[3]—
Serial number0800D2A-26381[3]—
Conveyor / handlingEdge Rail and Mesh Belt[3]—
Power208/240 VAC 3-Phase[3]—
MakeHeller[2]Varian[5]
Model1800 EXL[2]0332 F 9453 302[5]
TypeOven[2]—
Electrical configurationconverted to 208V 3 phase[2]—
Hours19,976[3]—
Year of manufacture2000[4]—
Asset Number—142841[5]
Last Confirm Date—October 14, 2025[6]
Category—Thermal / Diffusion[7]
Tool type—diffusion pump[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]ibesmt.comibesmt.com
  4. [4]smtnet.comsmtnet.com
  5. [5]Equipment inventory listing
  6. [6]fab-spares.comfab-spares.com
  7. [7]waferpedia.comwaferpedia.com