Comparison ledger
Hitachi 1305 BSG 3, SCREEN 80 EX Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | 80 EX WaferSCREEN |
|---|---|---|
| OEM | Hitachi | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SCREEN SK 80 |
| Specifications | ||
| Configuration | — | With 4 Cleaning Units[1] |
| Tool type | — | wafer scrubber[1] |
| Cleaning units | — | 4 cleaning units[1] |
| Cleaning method | — | brush cleaning[2] |
| Washing method | — | CO2 high-pressure washing[2] |
| Wafer size | — | 6 inch[3] |
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